瀏覽次數:319by:熾燄光電
6N 多晶矽(硅)
Poly Silicon 6N Element Concentratio (ppm wt)
#Poly#Silicon#6N#多晶#Polycrystall
Poly Silicon 6N
|
Element
|
Concentratio (ppm wt)
|
Element
|
Concentratio (ppm wt) |
|
Li
|
< 0.001
|
Ag
|
< 0.01
|
|
Be
|
< 0.001
|
Cd
|
< 0.05
|
|
B
|
0.22
|
In
|
< 0.01
|
|
F
|
< 1
|
Sn
|
< 0.01
|
|
Na
|
< 0.01
|
Sb
|
< 0.01
|
|
Mg
|
< 0.005
|
Te
|
< 0.01
|
|
Al
|
0.06
|
I
|
< 0.01
|
|
Si
|
Matrix
|
Cs
|
< 0.001
|
|
P
|
0.12
|
Ba
|
< 0.01
|
|
S
|
< 0.02
|
La
|
< 0.01
|
|
Cl
|
< 0.05
|
Ce
|
< 0.005
|
|
K
|
< 0.05
|
Pr
|
< 0.005
|
|
Ca
|
< 0.05
|
Nd
|
< 0.005
|
|
Sc
|
< 0.001
|
Sm
|
< 0.005
|
|
Ti
|
< 0.005
|
Eu
|
< 0.005
|
|
V
|
< 0.005
|
Gd
|
< 0.005
|
|
Cr
|
< 0.01
|
Tb
|
< 0.005
|
|
Mn
|
< 0.005
|
Dy
|
< 0.005
|
|
Fe
|
< 0.01
|
Ho
|
< 0.005
|
|
Co
|
< 0.005
|
Er
|
< 0.005
|
|
Ni
|
< 0.01
|
Tm
|
< 0.005
|
|
Cu
|
< 0.01
|
Yb
|
< 0.005
|
|
Zn
|
< 0.05
|
Lu
|
< 0.005
|
|
Ga
|
< 0.05
|
Hf
|
< 0.01
|
|
Ge
|
0.1
|
Ta
|
-
|
|
As
|
< 0.01
|
W
|
< 0.05
|
|
Se
|
< 0.01
|
Re
|
< 0.01
|
|
Br
|
< 0.01
|
Os
|
< 0.01
|
|
Rb
|
< 0.01
|
Ir
|
< 0.01
|
|
Sr
|
< 0.01
|
Pt
|
< 0.01
|
|
Y
|
< 0.01
|
Au
|
< 0.1
|
|
Zr
|
< 0.01
|
Hg
|
< 0.01
|
|
Nb
|
< 0.01
|
Tl
|
< 0.01
|
|
Mo
|
< 0.05
|
Pb
|
< 0.01
|
|
Ru
|
< 0.01
|
Bi
|
< 0.01
|
|
Rh
|
< 0.01
|
Th
|
< 0.005
|
|
Pd
|
< 0.01
|
U
|
< 0.005
|
Note : Analysis conducted according to SEMI PV1-0309
- S by SIMS.
Purity = 99.99995%
-
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